Temporary Bonding Using Paper Inserted PPC Layer

zhiyuan zhu

Abstract


Temporary bonding using paper inserted polypropylene carbonate (PPC) layer is demonstrated. The inserted paper layer can absorb photo acid generator (PAG)-induced acid and protect the substrate. Large improvements of bonding strength are achieved using paper inserted PPC layer. Especially, the bonding strength is much higher than that of PPC/PAG-PPC bonding for tissue paper. The results show that the paper fibers can absorb decomposed PPC and PAG-induced acid, thus protecting the substrate.


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DOI: https://doi.org/10.33180/InfMIDEM2018.403

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